TG-S6 5 rooms duplex winding magnetron sputtering coater

Detailed Product Description

 

TG-S6 5 rooms duplex winding magnetron sputtering coater

The coater for the vertical structure is with five rooms, there are two close Unwinding rooms, three coating chambers. Income, Unwinding Room size: 200mmX250mmX200mm, coating chamber size: 200mmX250mmX300mm. Each coating room is equipped with a pair of micro-shaped magnetic target. Tape Unwinding from the top of the room out into the coating chamber 1, 2, Mimuro, after the winding room. Volume away speed controlled by computer. Strip width is of 10 ~ 40mn, the thickness is of 20 ~ 100μm, length is of 10 ~ 100m. Tape through the three coating chambers, by the right target magnetron sputtering for coating; in the coating room, tape the heating temperature reached 800 .

Vacuum system is  equipped with F-250 molecular pump and 2XZ-15 Direct mechanical pump. Ultimate vacuum of 5 × 10-4Pa.

This machine is mainly used for scientific purpose. Is used in the metal strip special features double-sided coated film.