TG-S 8-model dual-chamber cartridges on target sputtering coater

Detailed Product Description

 

TG-S 8-model dual-chamber cartridges on target sputtering coater

The Machine with the horizontal tube-shaped structure, both before and after coating rooms, coating chamber size: diam.250mmX550mm; each room, equipped with a pairs of target and a cylindrical heater, the diameter of the target diam.95 mm, workpiece heating temperature up to 800 . End piece frame set on the round piece (diam.75 mm) into the front chamber after coating, and then into the room after the coating, coating process continuously rotating the workpiece holder so that the workpiece evenly plated double-sided films. Pumping system is equipped with F-250 molecular pump and 2X-30 mechanical pump. Limited Vacuum of 5X10-4Pa.

This machine mainly used for scientific purposes, for the coated superconducting thin films and so on.